Sputtering Materials for VLSI and Thin Film Devices, 1st Edition explosion limits 2 Smoke Tests

Sputtering Materials for VLSI and Thin Film Devices, 1st Edition explosion limits 2 Smoke TestsDescription Author: J Sarkar ISBN 9780815515937 Summary Key Features Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic

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